SPIE Proceedings [SPIE SPIE Advanced Lithography - San...

  • Main
  • SPIE Proceedings [SPIE SPIE Advanced...

SPIE Proceedings [SPIE SPIE Advanced Lithography - San Jose, California (Sunday 12 February 2012)] Alternative Lithographic Technologies IV - Block co-polymer guided self-assembly by surface chemical modification: optimization of multiple patterning process and pattern transfer

Oria, Lorea, Ruiz de Luzuriaga, Alaitz, Alduncín, Juan A., Pérez-Murano, Francesc, Tong, William M.
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
8323
Year:
2012
Language:
english
DOI:
10.1117/12.916339
File:
PDF, 2.53 MB
english, 2012
Conversion to is in progress
Conversion to is failed