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SPIE Proceedings [SPIE SPIE Photonics Europe - Brussels, Belgium (Monday 16 April 2012)] Optical Micro- and Nanometrology IV - Interferometry of AlN-based microcantilevers to determine the material properties and failure mechanisms
Gorecki, Christophe, Krupa, Katarzyna, Józwik, Michał, Gorecki, Christophe, Asundi, Anand K., Osten, WolfgangVolume:
8430
Year:
2012
Language:
english
DOI:
10.1117/12.922887
File:
PDF, 4.69 MB
english, 2012