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SPIE Proceedings [SPIE 1989 Microelectronic Intergrated Processing Conferences - Santa Clara (Tuesday 10 October 1989)] Dry Processing for Submicrometer Lithography - Magneto-Transport Characterization Of E-Beam-Induced Damage In GaAs-AlGaAs Heterostructures
Fink, Tobin, Smith, Doran D., Braddock, W. D., Bondur, James A., Reinberg, Alan R.Volume:
1185
Year:
1990
Language:
english
DOI:
10.1117/12.978066
File:
PDF, 463 KB
english, 1990