Design, development, EUVL applications and nano mechanical...

RSC Advances 2016 Vol. 6; Iss. 71

Design, development, EUVL applications and nano mechanical properties of a new HfO 2 based hybrid non-chemically amplified resist

Reddy, Pulikanti Guruprasad, Mamidi, Narsimha, Kumar, Pawan, Sharma, Satinder K., Ghosh, Subrata, Gonsalves, Kenneth E., Pradeep, Chullikkattil P.
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Volume:
6
Year:
2016
Language:
english
Journal:
RSC Adv.
DOI:
10.1039/C6RA10575K
File:
PDF, 1.39 MB
english, 2016
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