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SPIE Proceedings [SPIE International Conference on Microelectronics - Warsaw, Poland (Monday 21 September 1992)] International Conference of Microelectronics: Microelectronics '92 - Growth kinetics and properties of ultrathin films of silicon dioxide
Khatko, Vjacheslav V., Rumak, N. V., Sowinski, Andrzej, Grzybowski, Jan, Kucharski, Witold T., Romaniuk, Ryszard S.Volume:
1783
Year:
1992
Language:
english
DOI:
10.1117/12.131044
File:
PDF, 471 KB
english, 1992