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SPIE Proceedings [SPIE Micromachining and Microfabrication - Santa Clara, CA (Sunday 20 September 1998)] Materials and Device Characterization in Micromachining - Development of TiNi shape memory alloy film deposited by sputtering from separate Ti and Ni targets
Ohta, Akihiro, Bhansali, Shekhar, Kishimoto, Isao, Umeda, Akira, Friedrich, Craig R., Vladimirsky, YuliVolume:
3512
Year:
1998
Language:
english
DOI:
10.1117/12.324049
File:
PDF, 426 KB
english, 1998