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SPIE Proceedings [SPIE Microelectronic Manufacturing '99 - Santa Clara, CA (Wednesday 22 September 1999)] Multilevel Interconnect Technology III - Capping layers, cleaning method, and rapid thermal processing temperature on cobalt silicide formation
Saigal, Dinesh, Lai, Gigi, Yang, Lisa, Su, Jingang, Ngan, Ken, Narasimhan, Murali K., Chen, Fusen E., Singhal, Ajay, Lopes, Dave, Lian, Sean, Cao, Wanqing, Tsai, Kevin, Lo, Patrick, Lee, Shih-Ked, ShiVolume:
3883
Year:
1999
Language:
english
DOI:
10.1117/12.360574
File:
PDF, 1.16 MB
english, 1999