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SPIE Proceedings [SPIE Advanced Microelectronic Manufacturing - Santa Clara, CA (Sunday 23 February 2003)] Design and Process Integration for Microelectronic Manufacturing - Investigation of product design weaknesses using model-based OPC sensitivity analysis
Postnikov, Sergei V., Lucas, Kevin, Garza, Cesar M., Wimmer, Karl, LaCour, Patrick, Word, James C., Starikov, AlexanderVolume:
5042
Year:
2003
Language:
english
DOI:
10.1117/12.485263
File:
PDF, 241 KB
english, 2003