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SPIE Proceedings [SPIE Optical Metrology - Munich, Germany (Monday 18 June 2007)] Optical Measurement Systems for Industrial Inspection V - Measuring 3D geometries of microstructures with the laser-scanning confocal vibrometer microscope
Rembe, Christian, Osten, Wolfgang, Gorecki, Christophe, Bödecker, Sebastian, Armbruster, Bernd, Novak, Erik L., Bauer, MartinVolume:
6616
Year:
2007
Language:
english
DOI:
10.1117/12.725966
File:
PDF, 547 KB
english, 2007