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SPIE Proceedings [SPIE Lasers and Applications in Science and Engineering - San Jose, CA (Saturday 19 January 2008)] Photon Processing in Microelectronics and Photonics VII - Observation of self-assembled periodic nano-structures induced by femtosecond laser in both ablation and deposition regimes
Tang, Mingzhen, Holmes, Andrew S., Meunier, Michel, Zhang, Haitao, Her, Tsing-Hua, Arnold, Craig B., Niino, Hiroyuki, Geohegan, David B., Träger, Frank, Dubowski, Jan J.Volume:
6879
Year:
2008
Language:
english
DOI:
10.1117/12.763790
File:
PDF, 1.46 MB
english, 2008