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SPIE Proceedings [SPIE International Symposium on Photoelectronic Detection and Imaging: Technology and Applications 2007 - Beijing, China (Sunday 9 September 2007)] International Symposium on Photoelectronic Detection and Imaging 2007: Optoelectronic System Design, Manufacturing, and Testing - The preparation of AZO films with RF sputtering
Yu, Zhinong, Zhou, Liwei, Xu, Jin, Xue, We, Li, Xia, Li, JinweiVolume:
6624
Year:
2007
Language:
english
DOI:
10.1117/12.791173
File:
PDF, 273 KB
english, 2007