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SPIE Proceedings [SPIE Fourth International Symposium on Precision Mechanical Measurements - Anhui, China (Monday 25 August 2008)] Fourth International Symposium on Precision Mechanical Measurements - Suspension system design study for a tuning fork vibratory MEMS gyroscope
Wen, Yongpeng, Fei, Yetai, Fan, Kuang-Chao, Wang, Anlin, Jiang, Tao, Lu, Rongsheng, Liu, Zhao, Liu, GuangjunVolume:
7130
Year:
2008
Language:
english
DOI:
10.1117/12.819555
File:
PDF, 482 KB
english, 2008