SPIE Proceedings [SPIE SPIE Advanced Lithography - San...

  • Main
  • SPIE Proceedings [SPIE SPIE Advanced...

SPIE Proceedings [SPIE SPIE Advanced Lithography - San Jose, California (Sunday 21 February 2010)] Design for Manufacturability through Design-Process Integration IV - Exploring complex 2D layouts for 22nm node using double patterning/double etch approach for trench levels

Jessen, Scott W., Rieger, Michael L., Thiele, Joerg, Prins, Steven L., Blatchford, James W., Dillon, Brian W., Progler, Christopher J.
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
7641
Year:
2010
Language:
english
DOI:
10.1117/12.848350
File:
PDF, 7.09 MB
english, 2010
Conversion to is in progress
Conversion to is failed