SPIE Proceedings [SPIE SPIE Microtechnologies - Prague, Czech Republic (Monday 18 April 2011)] Smart Sensors, Actuators, and MEMS V - Gold-based thin multilayers for ohmic contacts in RF-MEMS switches
Mulloni, V., Schmid, Ulrich, Sánchez-Rojas, José Luis, Iannacci, J., Bartali, R., Leester-Schaedel, Monika, Micheli, V., Colpo, S., Laidani, N., Margesin, B.Volume:
8066
Year:
2011
Language:
english
DOI:
10.1117/12.886377
File:
PDF, 388 KB
english, 2011