Structural and optical properties of RF-biased PECVD TiO2...

Vacuum 2016 / 09 Vol. 131

Structural and optical properties of RF-biased PECVD TiO2 thin films deposited in an O2/TTIP helicon reactor

Li, D., Goullet, A., Carette, M., Granier, A., Zhang, Y., Landesman, J.P.

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Volume:

131

Language:

english

Journal:

Vacuum

DOI:

10.1016/j.vacuum.2016.07.004

Date:

September, 2016

File:

PDF, 1.40 MB

english, 2016

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