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SPIE Proceedings [SPIE San Diego '92 - San Diego, CA (Sunday 19 July 1992)] Diamond Optics V - Characterization of electron cyclotron resonance plasmas for diamond deposition
Jin, Shu, Molnar, Richard, Jong, Donald Y., Moustakas, Theodore D., Feldman, Albert, Holly, SandorVolume:
1759
Year:
1992
Language:
english
DOI:
10.1117/12.130760
File:
PDF, 589 KB
english, 1992