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SPIE Proceedings [SPIE Integrated Optoelectronics '94 - Lindau, Federal Republic of Germany (Sunday 10 April 1994)] Nanofabrication Technologies and Device Integration - New technologies of integrated optics elements fabrication: monolith integrated-optical device
Kamuz, Alexander M., Oleksenko, Pavel F., Ovsyannikov, Y. U., Kiyashko, S. D., Stril'chuk, Oksana N., Karthe, WolfgangVolume:
2213
Year:
1994
Language:
english
DOI:
10.1117/12.180972
File:
PDF, 422 KB
english, 1994