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SPIE Proceedings [SPIE Microelectronic Manufacturing - Austin, TX (Tuesday 18 October 1994)] Optical Characterization Techniques for High-Performance Microelectronic Device Manufacturing - Ex-situ and in-situ probing of Column IV interfaces using optical second harmonic generation
Dadap, Jr., Jerry I., Russell, N. M., Hu, X. F., Ekerdt, John G., Downer, Michael C., Doris, Bruce, Lowell, John K., Diebold, Alain C., Mathur, Jagdish P., Lowell, John K., Chen, Ray T.Volume:
2337
Year:
1994
Language:
english
DOI:
10.1117/12.186652
File:
PDF, 693 KB
english, 1994