SPIE Proceedings [SPIE Thin Film Physics and Applications: Second International Conference - Shanghai, China (Friday 15 April 1994)] Second International Conference on Thin Film Physics and Applications - Optical performance of Mo/Si multilayer coated lamellar phase grating in soft x-ray domain
Yuan, Lixiang, Fan, Zhengxiu, Yi, Kui, Yin, Gongjie, Shao, Jian-Da, Cui, Mingqi, Shen, Xiaoliang, Zhou, Shixun, Wang, Yongling, Chen, Yi-Xin, Mao, ShuzhengVolume:
2364
Year:
1994
Language:
english
DOI:
10.1117/12.190754
File:
PDF, 375 KB
english, 1994