SPIE Proceedings [SPIE SPIE Microtechnologies - Grenoble, France (Wednesday 24 April 2013)] Smart Sensors, Actuators, and MEMS VI - Simulation and design optimization of transparent heaters for spectroscopic micro cells
Völlm, Henning, Herrmann, Jonathan, Maier, Reinhard, Feili, Dara, Häublein, Volker, Ryssel, Heiner, Seidel, Helmut, Schmid, Ulrich, Sánchez de Rojas Aldavero, José Luis, Leester-Schaedel, MonikaVolume:
8763
Year:
2013
Language:
english
DOI:
10.1117/12.2017166
File:
PDF, 1.71 MB
english, 2013