SPIE Proceedings [SPIE Microelectronic Manufacturing 1996 - Austin, TX (Wednesday 16 October 1996)] Microelectronic Device and Multilevel Interconnection Technology II - SOG etch-back process induced surface roughness
Chu, Po-Tao, Chen, Sen-Fu, Wu, Jie-Shin, Hung, Chih-Chien, Lin, Ting-Huang, Chao, Ying-Chen, Chen, Ih-Chin, Sasaki, Nobuo, Patel, Divyesh N., Dixit, Girish A.Volume:
2875
Year:
1996
Language:
english
DOI:
10.1117/12.250877
File:
PDF, 1.50 MB
english, 1996