SPIE Proceedings [SPIE Microelectronic Manufacturing 1996 - Austin, TX (Wednesday 16 October 1996)] Process, Equipment, and Materials Control in Integrated Circuit Manufacturing II - Particle reduction study at interlayer dielectric deposition
McAfee, Anda, Jacobs, Mercedes, Hiatt, Robert, Iturralde, Armando, Lin, Te-HuaVolume:
2876
Year:
1996
Language:
english
DOI:
10.1117/12.250908
File:
PDF, 348 KB
english, 1996