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SPIE Proceedings [SPIE ISMA '97 International Symposium on Microelectronics and Assembly - Singapore, Singapore (Monday 23 June 1997)] Microlithographic Techniques in IC Fabrication - Transmission electron microscopy of defects in NMOS and PMOS structures
Bourdillon, Antony J., Koh, Yew G., Chiang, Shu L., Lim, Chong W., Kong, Jong Ren, Guobing, Cao, Yoon, Soon Fatt, Yu, Raymond, Mack, Chris A.Volume:
3183
Year:
1997
DOI:
10.1117/12.280546
File:
PDF, 1.21 MB
1997