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SPIE Proceedings [SPIE Optoelectronics '99 - Integrated Optoelectronic Devices - San Jose, CA (Saturday 23 January 1999)] Laser Applications in Microelectronic and Optoelectronic Manufacturing IV - Correlation between power density fluctuation and grain size distribution of laser-annealed polycrystalline silicon
Suzuki, Kenkichi, Saitou, Masakazu, Takahashi, Michiko, Hayashi, Nobuaki, Terabayashi, Takao, Dubowski, Jan J., Helvajian, Henry, Kreutz, Ernst-Wolfgang, Sugioka, KojiVolume:
3618
Year:
1999
Language:
english
DOI:
10.1117/12.352693
File:
PDF, 2.74 MB
english, 1999