SPIE Proceedings [SPIE Symposium on Micromachining and Microfabrication - Santa Clara, CA (Monday 20 September 1999)] Miniaturized Systems with Micro-Optics and MEMS - Programmable two-dimensional microshutter arrays
Moseley, Jr., Samuel H., Fettig, Rainer K., Kutyrev, Alexander S., Bowers, Charles W., Kimble, Randy A., Orloff, Jon, Woodgate, Bruce E., Motamedi, M. Edward, Goering, RolfVolume:
3878
Year:
1999
Language:
english
DOI:
10.1117/12.361284
File:
PDF, 803 KB
english, 1999