![](/img/cover-not-exists.png)
SPIE Proceedings [SPIE Asia Pacific Symposium on Microelectronics and MEMS - Gold Coast, Australia (Wednesday 27 October 1999)] Electronics and Structures for MEMS - Integration of MEMS devices
French, Patrick J., Bergmann, Neil W., Reinhold, Olaf, Tien, Norman C.Volume:
3891
Year:
1999
Language:
english
DOI:
10.1117/12.364452
File:
PDF, 4.37 MB
english, 1999