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SPIE Proceedings [SPIE Indo-Russian Workshop on Micromechanical Systems - New Delhi, India (Tuesday 2 February 1999)] Indo-Russian Workshop on Micromechanical Systems - Three-dimensional micron and submicron structures based on fiberglass technologies
Beloglazov, Valentin I., Soukhoveev, Sergey P., Suetin, Nikolay V., Pustovoy, Vladimir I., Jain, Vinoy K.Volume:
3903
Year:
1999
Language:
english
DOI:
10.1117/12.369452
File:
PDF, 2.50 MB
english, 1999