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SPIE Proceedings [SPIE First International Symposium on Laser Precision Microfabrication (LPM2000) - Omiya, Saitama, Japan (Wednesday 14 June 2000)] First International Symposium on Laser Precision Microfabrication - Preparation of metal oxide thin films using coating photolysis process with ArF excimer laser
Tsuchiya, Tetsuo, Watanabe, Akio, Imai, Yoji, Niino, Hiroyuki, Yabe, Akira, Yamaguchi, Iwao, Manabe, Takaaki, Kumagai, Toshiya, Mizuta, Susumu, Miyamoto, Isamu, Sugioka, Koji, Sigmon, Thomas W.Volume:
4088
Year:
2000
Language:
english
DOI:
10.1117/12.405721
File:
PDF, 837 KB
english, 2000