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SPIE Proceedings [SPIE Micromachining and Microfabrication - San Francisco, CA (Monday 22 October 2001)] MEMS Components and Applications for Industry, Automobiles, Aerospace, and Communication - Micromachined pressure gauge for the vacuum range based on damping of a resonator
Kurth, Steffen, Hiller, Karla, Zichner, Norbert, Mehner, Jan, Iwert, Thomas, Biehl, Steffen, Doetzel, Wolfram, Gessner, Thomas, Helvajian, Henry, Janson, Siegfried W., Laermer, FranzVolume:
4559
Year:
2001
Language:
english
DOI:
10.1117/12.443024
File:
PDF, 604 KB
english, 2001