SPIE Proceedings [SPIE Symposium on Design, Test, Integration, and Packaging of MEMS/MOEMS 2002 - Cannes-Mandelieu, France (Tuesday 19 March 2002)] Design, Test, Integration, and Packaging of MEMS/MOEMS 2002 - MEMS variable optical attenuator (VOA) for DWDM applications
Zhang, Xu M., Liu, Ai Q., Lu, Chao, Tang, Ding Y., Wang, Fang, Liu, Zishun, Lu, C., Courtois, Bernard, Karam, Jean Michel, Markus, Karen W., Michel, Bernd, Mukherjee, Tamal, Walker, James A.Volume:
4755
Year:
2002
Language:
english
DOI:
10.1117/12.462847
File:
PDF, 485 KB
english, 2002