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SPIE Proceedings [SPIE Optical Science and Technology, the SPIE 49th Annual Meeting - Denver, CO (Monday 2 August 2004)] Nanoengineering: Fabrication, Properties, Optics, and Devices - High-aspect ratio grating fabrication by imprint lithography
Hirai, Yoshihiko, Dobisz, Elizabeth A., Eldada, Louay A., Konishi, Takaaki, Kanakugi, Tomohiro, Kawata, Hiroaki, Kikuta, HisaoVolume:
5515
Year:
2004
Language:
english
DOI:
10.1117/12.560249
File:
PDF, 478 KB
english, 2004