SPIE Proceedings [SPIE Photomask Technology - Monterey, CA...

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SPIE Proceedings [SPIE Photomask Technology - Monterey, CA (Monday 13 September 2004)] 24th Annual BACUS Symposium on Photomask Technology - Chemical characteristics of negative-tone chemically amplified resist for advanced mask making: II

Takeshi, Kazumasa, Staud, Wolfgang, Weed, J. Tracy, Tanabe, Masahito, Inokuchi, Daisuke, Fukushima, Yuichi, Okumoto, Yasuhiro, Okuda, Yoshimitsu
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Volume:
5567
Year:
2004
Language:
english
DOI:
10.1117/12.569516
File:
PDF, 403 KB
english, 2004
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