SPIE Proceedings [SPIE MOEMS-MEMS 2007 Micro and Nanofabrication - San Jose, California, United States (Saturday 20 January 2007)] Micromachining Technology for Micro-Optics and Nano-Optics V and Microfabrication Process Technology XII - Soft-lithographic replication of 3D polymeric microstructures created with MAP

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