SPIE Proceedings [SPIE 27th Annual BACUS Symposium on Photomask Technology - Monterey, CA (Monday 17 September 2007)] Photomask Technology 2007 - Determining OPC target specifications electrically instead of geometrically
Zhang, Qiaolin Charlie, Naber, Robert J., Kawahira, Hiroichi, van Adrichem, PaulVolume:
6730
Year:
2007
Language:
english
DOI:
10.1117/12.746746
File:
PDF, 186 KB
english, 2007