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SPIE Proceedings [SPIE Lasers and Applications in Science and Engineering - San Jose, CA (Saturday 19 January 2008)] Photon Processing in Microelectronics and Photonics VII - Shallow hole drilling with ultrashort pulse lasers
Campbell, B. R., Holmes, Andrew S., Meunier, Michel, Forster, L. A., Lehecka, T. M., Arnold, Craig B., Niino, Hiroyuki, Thomas, J. G., Semak, V. V., Geohegan, David B., Träger, Frank, Dubowski, Jan J.Volume:
6879
Year:
2008
Language:
english
DOI:
10.1117/12.760630
File:
PDF, 328 KB
english, 2008