Fundamentals of planar-type inductively coupled thermal plasmas on a substrate for large-area material processing
Tial, Mai Kai Suan, Irie, Hiromitsu, Maruyama, Yuji, Tanaka, Yasunori, Uesugi, Yoshihiko, Ishijima, TatsuoVolume:
55
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.7567/JJAP.55.07LB03
Date:
July, 2016
File:
PDF, 1.81 MB
english, 2016