An experimental approach for growth rate determination of LCVD-written aluminium stripes
V. Shanov, C. Popov, B. Ivanov, A. Souleva, G. PeevVolume:
4
Language:
english
Pages:
4
DOI:
10.1007/bf00226634
Date:
March, 1993
File:
PDF, 321 KB
english, 1993