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Optical spectrometry in the diagnosis of ion-plasma processes
Kostrin, D. K., Uhov, A. A., Lisenkov, A. A.Volume:
28
Language:
english
Journal:
Vakuum in Forschung und Praxis
DOI:
10.1002/vipr.201600608
Date:
June, 2016
File:
PDF, 274 KB
english, 2016