SPIE Proceedings [SPIE International Symposium on Photonics and Applications - Singapore, Singapore (Monday 29 November 1999)] Photonics Technology into the 21st Century: Semiconductors, Microstructures, and Nanostructures - High-energy photon lithography for fabrication of photonic devices
Lee, Sing, Kudryashov, Vladimir A., Lee, Paul C. K., Liu, Mahe, Tan, Tuck L., Ho, Seng Tiong, Zhou, Yan, Chow, Weng W., Arakawa, YasuhikoVolume:
3899
Year:
1999
Language:
english
DOI:
10.1117/12.369405
File:
PDF, 2.08 MB
english, 1999