An instrument transfer function approach to atomic force...

An instrument transfer function approach to atomic force microscopy for surface metrology

Burns, Daniel J., Shilpiekandula, Vijay, Toumi, Kamal Youcef
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Volume:
6
Year:
2010
Language:
english
Journal:
International Journal of Nanomanufacturing
DOI:
10.1504/ijnm.2010.034798
File:
PDF, 1.28 MB
english, 2010
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