An instrument transfer function approach to atomic force microscopy for surface metrology
Burns, Daniel J., Shilpiekandula, Vijay, Toumi, Kamal YoucefVolume:
6
Year:
2010
Language:
english
Journal:
International Journal of Nanomanufacturing
DOI:
10.1504/ijnm.2010.034798
File:
PDF, 1.28 MB
english, 2010