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ChemInform Abstract: Electrical Conduction and Dielectric Breakdown in Sputter-Deposited Silicon Dioxide Films on Polysilicon.
SUYAMA, S., OKAMOTO, A., SERIKAWA, T.Volume:
20
Journal:
ChemInform
DOI:
10.1002/chin.198913009
Date:
March, 1989
File:
PDF, 137 KB
1989