ChemInform Abstract: A Comparison of Silicon Wafer Etching...

ChemInform 1990 / 01 Vol. 21; Iss. 4

ChemInform Abstract: A Comparison of Silicon Wafer Etching by KOH and Acid Solutions.

DYER, L. D., GRANT, G. J., TIPTON, C. M., STEPHENS, A. E.
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Volume:
21
Journal:
ChemInform
DOI:
10.1002/chin.199004318
Date:
January, 1990
File:
PDF, 190 KB
1990
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