ChemInform Abstract: Heavy Boron Doping in Low-Temperature...

ChemInform Abstract: Heavy Boron Doping in Low-Temperature Si Photoepitaxy.

YAMAZAKI, T., WATANABE, S., ITO, T.
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Volume:
21
Journal:
ChemInform
DOI:
10.1002/chin.199014349
Date:
April, 1990
File:
PDF, 200 KB
1990
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