Synthesis, Characterization, and Thermal Properties of Chlorine-Containing 1,1,2,2-Tetraaminodisilanes and Their Potential as Chemical Vapor Deposition Precursors for Silicon Nitride Films
Du, Liyong, Chu, Wenxiang, Miao, Hongyan, Wang, Dawei, Xu, Chongying, Ding, YuqiangVolume:
2015
Language:
english
Journal:
European Journal of Inorganic Chemistry
DOI:
10.1002/ejic.201500493
Date:
July, 2015
File:
PDF, 1.94 MB
english, 2015