P-2: Novel High Mobility Oxide TFT with Self-Aligned S/D...

SID Symposium Digest of Technical Papers 2016 / 05 Vol. 47; Iss. 1

P-2: Novel High Mobility Oxide TFT with Self-Aligned S/D Regions Formed by Wet-etch process

Ji, Kwang Hwan, Noh, Jiyong, Yun, Pil Sang, Bae, Jong Uk, Park, Kwon-Shik, Kang, InByeong
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Volume:
47
Language:
english
Journal:
SID Symposium Digest of Technical Papers
DOI:
10.1002/sdtp.10820
Date:
May, 2016
File:
PDF, 317 KB
english, 2016
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