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Simple unimorph deformable mirrors fabricated from piezo buzzers
Pribošek, Jaka, Diaci, Janez, Sinzinger, StefanVolume:
26
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/26/5/055009
Date:
May, 2016
File:
PDF, 2.00 MB
english, 2016