Mg dopant distribution in an AlGaN/GaN p-type superlattice...

Journal of Physics Conference Series 2010 / 02 Vol. 209

Mg dopant distribution in an AlGaN/GaN p-type superlattice assessed using atom probe tomography, TEM and SIMS

Bennett, S E, Clifton, P H, Ulfig, R M, Kappers, M J, Barnard, J S, Humphreys, C J, Oliver, R A
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Volume:
209
Language:
english
Journal:
Journal of Physics: Conference Series
DOI:
10.1088/1742-6596/209/1/012014
Date:
February, 2010
File:
PDF, 1.15 MB
english, 2010
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