SPIE Proceedings [SPIE Micro - DL Tentative - San Jose, CA...

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SPIE Proceedings [SPIE Micro - DL Tentative - San Jose, CA (Sunday 1 March 1992)] Electron-Beam, X-Ray, and Ion-Beam Submicrometer Lithographies for Manufacturing II - Performances of the CXrL x-ray beamlines (Poster Paper)

Cole III, Richard K., Anderson, Paul D., Wells, Gregory M., Brodsky, Eric, Yamazaki, Kuniaki, Cerrina, Franco, Peckerar, Martin C.
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Volume:
1671
Year:
1992
Language:
english
DOI:
10.1117/12.136048
File:
PDF, 576 KB
english, 1992
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