SPIE Proceedings [SPIE Micromachining and Microfabrication...

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SPIE Proceedings [SPIE Micromachining and Microfabrication - San Jose, CA (Saturday 24 January 2004)] MEMS/MOEMS Components and Their Applications - Simulation and characterization of silicon-based 0.5-MHz ultrasonic nozzles

Song, Y. L., Janson, Siegfried W., Henning, Albert K., Tsai, S. C., Chen, W. J., Chou, Y. F., Tseng, T. K., Tsai, C. S.
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Volume:
5344
Year:
2004
Language:
english
DOI:
10.1117/12.527862
File:
PDF, 286 KB
english, 2004
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