SPIE Proceedings [SPIE Microelectronics, MEMS, and Nanotechnology - Brisbane, Australia (Sunday 11 December 2005)] Device and Process Technologies for Microelectronics, MEMS, and Photonics IV - In-situ optical monitoring of silicon membrane etching
Chiao, Jung-Chih, Chollet, Franck, Hwai, Ooi G., Dzurak, Andrew S., Jagadish, Chennupati, Thiel, David V.Volume:
6037
Year:
2005
Language:
english
DOI:
10.1117/12.638894
File:
PDF, 872 KB
english, 2005